E-Beam
Advanced Energy high voltage multi-output power supplies for SEM and lithography applications.
Browse the tables below or call +44 (0)1793 784389 to talk to a member of our technical sales team.
Features:
- Compact module design
- Multiple outputs
- Various options
Applications:
- SEM
- Lithography
- Electron beam
E-Beam Power Supplies
| Part Number | Accelerator | Suppressor | Extractor | Filament | Ripple | Stability | Datasheet |
|---|---|---|---|---|---|---|---|
| EG353 | -35kV | -1kV | +10kV | Floating 5V, 3A | < 1.6ppm | < 10ppm | EG353 |
| G603 | -60kV | -1kV | +10kV | Floating 5V, 3A | < 1.3ppm | < 5ppm | On request |
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