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E-Beam

Advanced Energy high voltage multi-output power supplies for SEM and lithography applications.

Browse the tables below or call +44 (0)1793 784389 to talk to a member of our technical sales team.

Features:

  • Compact module design
  • Multiple outputs
  • Various options

Applications:

  • SEM
  • Lithography
  • Electron beam

  • Advanced Energy EG353 right

E-Beam Power Supplies

Part NumberAcceleratorSuppressorExtractorFilamentRippleStability Datasheet
EG353-35kV-1kV+10kVFloating 5V, 3A< 1.6ppm< 10ppmEG353
G603-60kV-1kV+10kVFloating 5V, 3A< 1.3ppm< 5ppmOn request

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